Metamaterial structure has resonant and strip line elements comprising a photoconductive semiconductor material formed on substrate to induce negative permeability and negative permittivity in operating frequency range

ABSTRACT

Materials and structures whose index of refraction can be tuned over a broad range of negative and positive values by applying above band-gap photons to a structure with a strip line element, a split ring resonator element, and a substrate, at least one of which is a photoconductive semiconductor material. Methods for switching between positive and negative values of n include applying above band-gap photons to different numbers of elements. In another embodiment, a structure includes a photoconductive semiconductor wafer, the wafer operable to receive above band-gap photons at an excitation frequency in an excitation pattern on a surface of the wafer, the excitation patterns generating an effective negative index of refraction. Methods for switching between positive and negative values of n include projecting different numbers of elements on the wafer. The resonant frequency of the structure is tuned by changing the size of the split ring resonator excitation patterns.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation application of patent applicationSer. No. 11/537,848, filed in the United States on Oct. 2, 2006, whichis a nonprovisional of and claims the benefit of provisional patentapplication No. 60/727,257, filed in the United States on Sep. 30, 2005,each of which are incorporated by reference herein in their entireties.

BACKGROUND OF THE INVENTION

This invention relates generally to the field of negative index ofrefraction materials, and more particularly, to materials whose index ofrefraction can be tuned over a broad range of negative and positivevalues.

Material containing an electric permittivity and magnetic permeabilitythat are simultaneously negative for some frequency have a negativeindex of refraction, and have been called left handed material (LHM) ornegative index material (NIM). V. G. Veselago, in “The electrodynamicsof substances with simultaneously negative values of ∈ and μ”, SovietPhys. Usp. 10, 509 (1968), described some characteristics of such amaterial, including a negative index of refraction and the ability tore-focus light passing through a thin slab composed of this material.

In the mid to late 1990s, John Pendry described some thin wires andsplit ring resonators (SRR) that paved the way to the fabrication of ameta-material that exhibited the negative index properties at microwavefrequencies.

In J. B. Pendry, et. al., Phys. Rev. Lett., 76 4773 (1996), Pendrydisclosed that by using an array of thin metal wires, the plasmafrequency of a metal could be shifted predictably to microwavefrequencies. In J. B. Pendry, et. al., IEEE Trans. Microw. TheoryTechniques, 47 2075 (1999), Pendry disclosed that by using an array ofnon-magnetic coupled metallic split ring resonators (SSR), thepermeability of a metamaterial could be made to have negative values.This was demonstrated in the microwave by Smith in D. Smith, et. al.,Phys. Rev. Lett., 84 4184 (2000), and more recently in the 100 terahertzrange by Linden, in S. Linden, et. al., Science, 306, 1351 (2004). Inthese structures, the size and spacing of the individual componentscomprising the metamaterial are assumed much smaller than the wavelengthof the resonant frequency of operation. They are also fixed frequencystructures.

Smith's NIM structure used split ring resonators and strip lines made ofcopper over circuit board material. Smith's NIM structure is functionalonly at a single narrow band frequency, but demonstrated that microwaveradiation passing through the wedged shaped NIM was bent through a largenegative angle obeying Snell's Law, n₁ sin θ₁=n₂ sin θ₂. In suchnegative index materials, since n₂ is negative, sin θ₂ is also negative,yielding a large change in angle.

C. G. Parazzoli, et. al., Phys. Rev. Lett., 90 107401 (2003) A. A.Houck, et. al., Phys. Rev. Lett., 90 137401 (2003), have addedadditional confirmation to the results of Pendry and Smith, and furtherdemonstrate the properties of a negative index of refraction predictedby Veselago.

Intrinsically photoconductive materials such as gallium arsenide andsilicon have been used as high frequency substrates, with roll offs ofgreater than 50-100 GHz for Si and 1 THz for GaAs, as described in P.Abele, et. al., IEEE MTT-S Digest, 1681 (2002), D. W. Van der Weild,Appl. Phys. Lett. 65, 881 (1994), and U. Bhattacharya, et. al, IEEEMicrowave and Guided Wave Letters 5, 50 (1995). Photoconductive bridgingof strip line waveguides and resonators on Si have been observed atfrequencies as high as 15 GHz with as little as 1 milliwatt per squaremm CW illumination at 870 nm, as described in Y. Horri and M. Tsutsumi,Asia Pacific Microwave Conf., 561 (1997). More recently, an IR-defined,photoconductive microwave bowtie antenna in Si exhibited turn-oncharacteristics at 0.1 watts/cm² at 970 nm with metallic (copper) likebehavior at 1 watt/cm² CW illumination between 1-18 GHz, as described inD. Liu, et. al., IEEE Photon. Technol. Lett. Vol. 10, page 716 (1998).

Some negative index of refraction composite materials are described incommonly assigned U.S. patent application Ser. No. 11/279,460 toRachford, the entire disclosure of which is incorporated by referenceherein.

BRIEF SUMMARY OF THE INVENTION

One embodiment of the invention is directed to a structure operable tohave a below band-gap operational frequency range in which botheffective permeability and effective permittivity are negativesimultaneously, the index of refraction of the structure beingswitchable from positive to negative by applying or removing photons atan above band-gap excitation frequency. The structure includes asubstrate, at least one resonant element disposed on the substratearranged to induce a negative permeability at the operational frequency,and at least one strip line element disposed on the substrate forinducing a negative permittivity in the frequency range. At least one ofthe substrate, the strip line element, and the resonant element includesa photoconductive semiconductor material.

Another embodiment of the invention is directed to a method forswitching a metamaterial structure between a positive effective index ofrefraction value and a negative effective index of refraction. Thestructure has a substrate, at least one resonant element disposed on thesubstrate arranged to induce a negative permeability at a below band-gapoperational frequency, and at least one strip line element disposed onthe substrate arranged to induce a negative permittivity at theoperational frequency. At least one of the substrate, the strip lineelement, and the resonant element comprises a photoconductivesemiconductor material. The method comprises the photoconductivesemiconductor material receiving above band-gap photons at an excitationfrequency.

Another embodiment of the invention is directed to a structure with anindex of refraction that is switchable from positive to negative byapplying or removing photons at an above band-gap excitation frequency.The structure includes a photoconductive semiconductor wafer, the waferoperable to receive above band-gap photons at an excitation frequency inan excitation pattern on a surface of the wafer, the excitation patternsgenerating an effective negative index of refraction.

Another embodiment of the invention is directed to a method forswitching an effective index of refraction of a structure between apositive value and a negative value, the structure including aphotoconductive semiconductor wafer. The method includes applying aboveband-gap photons at an excitation frequency in an excitation pattern ona surface of the wafer.

Another embodiment of the invention is directed to a method for tuning ametamaterial structure between a positive effective index of refractionvalue and a negative effective index of refraction. The structure has asubstrate, at least one resonant element disposed on the substratearranged to induce a negative permeability at a below band-gapoperational frequency, and at least one strip line element disposed onthe substrate arranged to induce a negative permittivity at theoperational frequency. At least one of the substrate, the strip lineelement, and the resonant element comprises a photoconductivesemiconductor material. The method comprises the photoconductivesemiconductor material receiving above band-gap photons at an excitationfrequency. Changing the amount of above band-gap photons at anexcitation frequency results in a change in the index of refraction ofthe structure.

Another embodiment of the invention is directed to a method for tuningthe resonant frequency of a metamaterial structure with a positiveeffective index of refraction value and a negative effective index ofrefraction. The structure has a photoconductive semiconductor substrate.An excitation pattern including strip line elements and split ringresonator elements is projected on the substrate. The resonant frequencyis tuned by changing the projected pattern in real time.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates excitation frequency and operational frequencies formaterials in accordance with embodiments of the invention.

FIGS. 2A, 2B, and 2C illustrate a one dimensional negative index ofrefraction material structure or one segment of a two dimensionalnegative index of refraction material structure, in accordance with anembodiment of the invention.

FIGS. 3A and 3B illustrate elements of a negative index of refractionmaterial structure in accordance with an embodiment of the invention.

FIGS. 4A and 4B illustrate elements of a negative index of refractionmaterial structure in accordance with an embodiment of the invention.

FIGS. 4C, 4D, and 4E illustrate elements of a negative index ofrefraction material structure in accordance with an embodiment of theinvention.

FIGS. 4F and 4G illustrate elements of a negative index of refractionmaterial structure in accordance with an embodiment of the invention.

FIGS. 4H and 4I illustrate elements of a negative index of refractionmaterial structure in accordance with an embodiment of the invention.

FIGS. 5A and 5B illustrate a two dimensional negative index ofrefraction material structure in accordance with an embodiment of theinvention.

FIGS. 6A and 6B illustrate a three dimensional negative index ofrefraction material structure in accordance with an embodiment of theinvention.

FIG. 6C is a cross sectional view of a semiconductor wafer with twodifferent semiconductor material layers in accordance with an embodimentof the invention.

FIG. 7 illustrates tunability of the negative index of refraction for astructure in accordance with an embodiment of the invention.

FIG. 8A-8C illustrate an optically defined FIG. 9 illustrates differentangles of illumination of light sources on an exemplary photoconductivesemiconductor wafer in accordance with an embodiment of the invention.

FIG. 10 illustrates an embodiment in which high intensity, slightlyabove band-gap photons optically excite a series of photoconductivesemiconductor wafers.

FIG. 11A illustrates optical sources exciting an exemplary twodimensional photoconductive semiconductor wafer structure in accordancewith an embodiment of the invention.

FIG. 11B illustrates a cross sectional view of a transparent wafer withphotoconductive semiconductor material layers in accordance with anembodiment of the invention.

FIGS. 12A and 12B illustrate a two dimensional photoconductivesemiconductor wafer structure in accordance with another embodiment ofthe invention.

DETAILED DESCRIPTION OF THE INVENTION

Embodiments of the invention are directed to metamaterial structureshaving an index of refraction that is switchable and/or tunable from anegative index of refraction to a positive index of refraction bychanging the permeability and permittivity of the metamaterial structurein a desired frequency range.

The “excitation frequency” is the above band-gap frequency at whichphotons are applied to excite a metamaterial structure. The “frequencyrange of operation” or “operational frequency range” is the frequencyrange over which elements of the metamaterial can take on a positive ornegative value of the index of refraction. FIG. 1 illustrates theband-gap 10 of a semiconductor material, the exciting frequency 12, andthe frequency of operation 14. As illustrated in FIG. 1, the excitingfrequency 12 is above the band-gap and the operational frequency range14 is below the exciting frequency and below the band-gap.

In an exemplary embodiment, the frequency range of operation is in amicrowave band. More specifically, the frequency range of operation canbe about 1 GHz to about 200 GHz, or greater or lesser. The excitingfrequency can be in the ultraviolet, visible or near IR frequency bands.Other ranges of operational frequencies, including infrared and visible,are possible, depending on the materials used.

In general, FIG. 2 through 6 illustrate metamaterial structures thatinclude a transparent substrate with photoconductive semiconductormaterial deposited on the substrate.

FIG. 8-12 illustrate embodiments of the invention in which the substrateis a photoconductive semiconductor material.

Turning first to FIGS. 2A, 2B, and 2C, a one dimensional metamaterialstructure 20 in accordance with one embodiment of the invention or onesection of a two dimensional metamaterial structure.

The metamaterial structure 20 includes elements 22 and 23 formed ofintrinsic photoconductive semiconductor materials. The elements 22 and23 are formed on the faces 24 and 25 of substrate 20 that is transparentat the excitation frequency and the operational frequency.

The elements 22 and 23 are formed of an intrinsic photoconductivesemiconductor material such as silicon, germanium, gallium arsenide(GaAs), or gallium nitride (GaN). GaAs materials are suitable forterahertz operational frequencies, and silicon is suitable for microwavefrequencies of about 150 GHz to 200 GHz. GaN is a suitablephotoconductive semiconductormaterial element for operationalfrequencies in the infrared or visible bands.

In this embodiment, the substrate 20 is a sapphire wafer four inches indiameter. For microwave operational frequencies, other suitablesubstrates include polytetrafluoroethylene (PTFE), fused syntheticsilica (quartz), and thin polymer, oxide, and other semiconductormaterials. Other substrates considered “thin” with respect to theabsorption coefficient are also acceptable.

The split ring resonator elements 23 can produce an effective negativepermeability μ in a particular frequency region when the elements areexcited with the above band-gap photons. The intrinsic photoconductivesemiconductor strip line or wire-shaped elements 22 are elongated,linear elements that can produce a negative electric permittivity E overan overlapping frequency region when the elements are excited by aboveband-gap photons. Simultaneous negative permittivity and permeabilityproduces an effective negative index of refraction for the structure 20.

An optical source provides above band-gap photons at the excitationfrequency. The above band-gap photons are absorbed by the intrinsicphotoconductive material elements 22 and 23. When the elements 22 and 23are excited by above band-gap photons, the concentration of carriers inthe conduction band increases and the resistivity of the materialsdecrease. At high enough intensities of above band-gap photons, theintrinsic photoconductive semiconductor materials exhibit metal likebehavior in the frequency range of operation. Control of the number ofcarriers is accomplished by controlling the intensity and wavelength ofthe photons. When not excited by above band-gap photons, thephotoconductive elements 22 and 23 are dielectric, and the metamaterialstructure 20 has a positive effective index of refraction.

The resonant elements 23 can be square split ring resonators, as shownin FIG. 2A, or can be other suitable resonant shapes, such as thecircular split ring resonators and other shapes discussed in U.S. Pat.No. 6,791,432, the disclosure of which is incorporated herein in itsentirety.

The silicon split ring resonator structures 23 have an edge dimension dof approximately 7 mm. The size and spacing of the individual elementsis preferably much smaller than the wavelength at the resonant frequencyof operation. An upper limit of the edge dimension should be less than ¼to ⅓ of the operational wavelength. When groups of adjacent split ringresonator elements are activated together (e.g., a three by threearray), the edge dimension of the group should be less than ¼ to ⅓ ofthe operational wavelength.

Preferably, the intrinsic photoconductive semiconductor material has ahigh electrical resistivity unless excited with above band-gap photons.For example, high purity silicon has a resistivity of above 10,000Ohm-centimeters, and greater than 10⁸ Ohm-centimeters.

It is also preferred that the substrate have a low index of refraction,so the difference in index of refraction between the substrate and thesurrounding medium (e.g. air, other gas) will be low. For example,quartz has a relatively low index of refraction of 1.48, and atmosphericair has an index of refraction of about 1, resulting in a Δn of about0.48. It is also suitable to use a gas with a higher index of refractionthan air, to further reduce the value of Δn to reduce reflections fromthe excitation photons as they pass through the metamaterial.

In the embodiments above, the photoconductive semiconductor elements aresupported by a substrate or wafer. However, in other embodiments, nosubstrate is used, and the resonant elements and strip line elementshave air or another gas between the elements. For example, the resonantelements can be suspended as a series of chain links.

In an embodiment shown in FIGS. 3A and 3B, the rings 31, 33 of the splitring resonator elements are formed of a conductive metal such as copper.The gap between the ends 34, of the outer ring 31 is filled with aphotoconductive semiconductor material 32. A conductive metal wire orstrip line 37 is arranged on the opposite face of the substrate 30. Inoperation, when above band-gap photons are not present to excite thephotoconductive semiconductor material 32, the structure can take on anegative effective index of refraction for radiation in the operationalfrequency range. However, when above band-gap photons excite thephotoconductive semiconductor material 32, the split ring resonatorswill not induce the negative permeability, and structure will have apositive effective index of refraction. Alternatively, the inner ring 33can have photoconductive semiconductor material arranged in the gapbetween the ends of the inner ring, producing the same effect. It isalso suitable to include photoconductive semiconductor material arrangedin the gaps between the ends of both rings.

FIGS. 4A and 4B illustrate another embodiment in which the split ringresonators 41 are formed of a conductive metal such as copper, without aphotoconductive semiconductor material in the gap between the ends ofthe rings of the split ring resonators. The strip line elements 42 onthe opposite face of the substrate 40 are formed of alternating sectionsof a conductive metal 44, such as copper, and photoconductivesemiconductor material 43. When energy at the exciting frequency isapplied, the elements will resonate, producing a negative permittivityand a negative permeability at the required operational frequency.Without application of the above band-gap photons, the strip lineelement will not induce the negative effective permittivity, and theindex of refraction will be positive.

In the embodiment of FIGS. 4C, 4D, and 4E, the split rings 45 and 46 andthe strip lines 47 are metallic. The substrate 40 has is a transparentdielectric layer 49 such as sapphire with thin layers or films 48, 50 ofa photoconductive semiconductor material. In operation, without aboveband-gap photons, the metallic elements and substrate have a negativeindex of refraction. When sufficient above band-gap photons are applied,the photoconductive semiconductor layers short out the split ringresonator and wire elements, and the structure will have a positiveindex of refraction. In an exemplary embodiment, the substrate issapphire with a thin layer of silicon on both faces.

In the embodiment of FIGS. 4F and 4G, the split rings 145 and 146 arephotoconductive semiconductor material and the strip lines 147 aremetallic. The substrate is a transparent dielectric such as sapphire.

In the embodiment of FIGS. 4H and 4I, the split rings 150 and 151 aremetallic and the strip lines 152 are photoconductive semiconductormaterial. The substrate is a transparent dielectric, such as sapphire.

FIGS. 5A and 5B illustrates a two-dimensional metamaterial structure 58in accordance with another embodiment of the invention. Each wafer 51has split ring resonator elements 52 on one face 53 and a strip lineelement 55 arranged behind the split ring resonator on the opposite face54 of the wafer. Rows of wafers 51 and 56 are arranged perpendicular toeach other. Energy in the operational frequency range in the x-y planewill be affected by the negative index of refraction that results fromapplication of above band-gap photons at the excitation frequency.

It is preferred that the structure include at least three elements ineach direction x, y, and z. As illustrated in FIG. 5B, three parallelwafers 51 extend in the x direction and three parallel wafers 56 extendin the y direction. The three by three array of wafers should have anouter dimension d smaller than about λ/4 to λ/3, where λ is thewavelength of the operational frequency. Much larger structures withmany more rows wafers are also possible.

A three dimensional metamaterial structure 60 is illustrated in FIG. 6A.The structure includes substrates arranged perpendicular to each other,each substrate having split ring resonator elements on one face of thesubstrate and a strip line element on the opposite face of thesubstrate. As illustrated in FIG. 6B, The structure 60 can be made bysandwiching the two dimensional structure 58 of FIGS. 5A and 5B betweenparallel substrates 61.

In operation, the three dimensional metamaterial structure 60 isdirectionally pumped by one or more lasers. The laser or lasersselectively illuminate none, some, or all of the photoconductiveelements along three independent axes (x, y, z). By turning on and offthe above band-gap source of photons, the metamaterial structure can bemade to switch between their positive index values (PIM) and negativeindex values.

For the one, two, and three dimensional structures discussed herein, thephotoconductive elements on either sides of the wafer can beindependently switched on and off. By selectively illuminating differentnumbers of elements, the permittivity and permeability can be “tuned”,or independently manipulated, over a broad range of positive andnegative values, and hence, the index of refraction can be tuned over abroad range of values. This is a result of averaging over the local PIMand NIM elements whose dimensions are considered small compared to thewavelength of the operational frequency. The maximum positive value ofthe index of refraction occurs when none of the elements areilluminated, when both the permittivity and permeability are at theirmaximum positive values. The most negative value of the index ofrefraction occurs when all of the split ring resonator elements and allof the wire elements are illuminated, so all the split ring resonatorelements contribute to the negative permeability and all the wireelements contribute to the negative permittivity.

The ability to turn on and off individual elements or entire regions ofa negative index material has a clear advantage. When the negative indexelements are small compared to the wavelength of the operationalfrequency electromagnetic waves passing through the material, theelectromagnetic wave does not distinguish, on average, how individualelements of the negative index material are contributing to theelectromagnetic response. Similarly, when groups of individual elementsof the negative index material structure have a group size consideredsmall compared to the wavelength, the wave does not distinguish, onaverage, how a group of elements contributes to the electromagneticresponse. Instead, by turning on and off individual components or groupsof components, the value of the permeability and permittivity of thestructure locally will change, thus changing the effective index ofrefraction at a given frequency when integrated over the negative indexmaterial structure as a whole. By controlling how some or all of theelements are switched or tuned, the index of refraction can take on anyvalue between the two index extremes of the most positive index ofrefraction and the most negative index of refraction. The continuity ofthe tuning range can be stepwise or continuous, depending on the finitesize of the smallest element within the structure. The step size may notbe discernable when the element size is much smaller than the resonantwavelength.

In another embodiment of the invention, the substrate may be a wideband-gap semiconductor material such that the band-gap of the of thesubstrate material is larger than the band-gap of the semiconductorelements on the substrate material. For example, FIG. 6C shows a crosssectional view of a split ring resonator 161 and a stripline element 162disposed on opposite faces of a substrate 163. The substrate 163 and theelements 161 and 162 are semiconductors, however, the semiconductormaterial of the substrate 163 has a higher bandgap energy than the splitring resonator and strip line elements. The substrate will betransparent to radiation having a frequency above the bandgap of the SRRand strip line elements and below the bandgap of the substrate. Thesubstrate will be conductive when receiving radiation above the bandgapof the substrate. Applying above band-gap energy can thus short out thesplit ring resonators and strip line elements. Other variations are alsopossible.

Each of the structures of FIG. 2A-6B can be fabricated with a wideband-gap semiconductor material, allowing the structures to befabricated entirely of semiconductor materials. A wide band-gapphotoconductive semiconductor substrate applied to the aboveconfigurations has the advantage of being able to be optically excitedwith above band-gap wide band-gap photons allowing additional degrees offreedom to the circuit design.

In addition, the semiconductor elements described in FIGS. 2A-6B may bemade from different photoconductive semiconductor materials, each withits specific band-gap, providing additional design flexibility.

An embodiment of a metamaterial structure shaped in the form of a prismcan illustrate the tuning effect on the index of refraction resultingfrom exciting different numbers of elements. As shown in FIG. 7, tuningthe index of refraction of a prism-shaped metamaterial structure 70 byoptically exciting individual elements or groups of elements of themetamaterial structure by varying the distribution of laser energy 71.Electromagnetic energy 75 in the operational frequency is incident onthe prism shaped structure 70. When the laser is off, the effectiveindex of refraction is at a maximum positive value. As the number ofexcited split ring resonators and more strip line elements increases,the index of refraction changes becomes more negative. As the individualelements or groups of elements are excited, the output beam ofelectromagnetic energy will be swept spatially through a large angle asthe index of refraction becomes more negative. Maximum negative indexvalues occur when all elements are excited. Turning the laser on and offswitches the effective index of refraction between its most positivevalue and its most negative value.

In another exemplary embodiment the metamaterial structure is configuredas a lens with a tunable focal length. Changing the index of refractionof the structure by optically exciting individual elements or groups ofelements will have the effect of changing the focal length of a lens.Since the potential range of index of refraction has both positive andnegative values, the same lens formed of the metamaterial structure canbe made to perform as a convex or concave lens. Other embodimentsinclude WDM systems, beam compression systems, encryption systems, andfrequency lock-in systems using the exemplary photoconductivemetamaterials discussed herein.

FIGS. 8A, 8B, and 8C illustrate another embodiment of the invention, inwhich the substrate or wafer 80 itself is formed of a photoconductivesemiconductor material. The individual split ring resonator elements 81and strip line elements 82 are optically defined as an excitationpattern on the wafer 80 that results from projecting light in a patternon the surface of the photoconductive semiconductor wafer 80. Theelements are photoexcited silicon. FIG. 8A is a photograph of anexcitation pattern of a Pendry split ring resonator projected onto thesurface of intrinsic silicon 80 with a pulsed green laser at awavelength of 532 nm. The silicon has a resistivity of at least 10,000Ohm-cm. The excitation patterns forming the elements 81 and 82 areprojected onto the substrate 80 from both sides of the substrate. Thewafer should be thick enough to generate an element on one face of thesubstrate without interfering with the element on the opposite side ofthe substrate. For example the wafer should have an overall thickness oftwice 3/α, where α is the absorption coefficient at the excitationfrequency, more than 95% of the intensity of the incident energy at theexcitation frequency will be absorbed before reaching the midpoint ofthe wafer.

FIG. 9 shows a one dimensional metamaterial structure comprising aphotoconductive semiconductor substrate 90. Optical sources 92 and 93and projection masks 94 and 95 produce excitation patterns 91 on theopposite faces of the photoconductive conductive semiconductor wafer 90.

Lenses 96, 97, or other optical devices can vary the magnification ofthe excitation patterns (the above band-gap optical images on thephotoconductive semiconductor material structure), thus varying theoperational frequency of the device. Zoom lenses can change themagnification by more than an order of magnitude. Changing the size ofthe optical image by an order of magnitude tunes the resonant frequencyby a decade or more in microwave frequency ranges.

Tuning of the index of refraction can be accomplished by using differentprojection masks to produce more or fewer excitation patterns on thewafer 90, or by covering or otherwise blocking some of the projectionmask cutouts.

Electromagnetic radiation 99 in the operational frequency band that istraveling in the plane of the wafer will be affected by the resultingnegative or positive index of refraction.

As discussed in previous paragraphs addressing FIGS. 8A, 8B, and 8C, thethickness of the wafer should be sufficient to prevent the excitationpatterns on opposite faces of the wafer from interfering with eachother.

In another embodiment shown in FIG. 10, a stack of parallel wafers 101,102, 103 is arranged to receive above band-gap photons in excitationpatterns that will produce both an effective negative permittivity andan effective negative permeability. At above band-gap excitationfrequencies close to the band edge, the absorption coefficient will below, and the semiconductor wafer will be relatively transparent at theexcitation frequency. If the intensity of the photons is sufficientlyhigh, the excitation patterns will extend through three or more wafers.Split ring resonators and strip line elements can be projected onto thewafers. Alternatively, split ring resonators can be projected onto thewafers and metal strip lines (e.g., copper) can be arranged between thewafers. The dimensions of the copper wires need not change as long asthe resonant frequency of the split ring resonators remains below theplasma frequency of the wires.

Two and three dimensional metamaterial structures formed ofphotoconductive semiconductor wafers can also be illuminated by lasersand projection masks, as illustrated in FIG. 11A. The substrate can alsocomprise a sapphire or other transparent wafer 116 with a thin layer115, 116 of photoconductive semiconductor material on one or both faces,as illustrated in FIG. 11B. The thickness of the semiconductor layerswould control the maximum thickness of the projected elements. Asuitable thickness for a silicon layer on a sapphire substrate is aboutone to three microns for a microwave operational frequency. This has anadvantage of allowing a thinner substrate to be used, and to make theexcitation pattern more uniform throughout its depth.

FIGS. 12A and 12B illustrate another two dimensional metamaterialstructure comprising a wafer of a photoconductive semiconductor materialsuch as intrinsic silicon. Cut-outs 121, 122 extend through the wafer toprovide surfaces 124, 125 on which to project excitation patterns. Oneor more lasers 130 and projection masks 131 can project excitationpatterns on the surfaces 125, 124 formed by the cutouts in the wafer. Aprojection of split ring resonator elements 1 wide by 3 deep can beprojected on walls 124 and 125 while a strip line is projected ontowalls 126 and the 4th wall. Dimension “a” would be much smaller thandimension “b” and “T” would equal 3 times “b” in depth. The result wouldbe a 2 dimensional NIM structural equivalent of the SRR and striplinesdemonstrated by Smith using circuit board and metal structures (D.Smith, et. al., Phys. Rev. Lett., 84 4184 (2000)), but without any metalelements.

A three by three array of split ring resonators can be is projected ontotwo walls of the wall of the cutout 121, and corresponding strip linescan be are projected onto the other two walls of the cutout. The threeby three array dimension should be less than about ¼ to ⅓ of theoperational wavelength.

As discussed in previous paragraphs, the operational frequency of thestructure can be tuned by varying the size and shape of the excitationpatterns on the wafer 120. In addition, the index of refraction can betuned across a broad range of positive and negative values by projectingnone, a few, or all of the possible excitation patterns on the wafer. Atsome angles, the edges of the wafer can block the exciting photons fromreaching the walls of the cutouts. The optical source is thereforepreferably arranged at a small angle from the vertical (z) axis. In anexemplary embodiment, the angle between the incident photons and the zaxis is less than 11°. The direction of the excitation lasers may besimultaneously from both the top and bottom of the wafer 120, doublingthe length of the space available for projection (T). So, if laser lightis directed toward opposite faces of the wafer, the wafer can be twiceas thick, with twice as many elements projected onto the walls of thewafer cutouts.

The illuminated portions of the photoconductive semiconductor materialthat form the elements can be split ring resonators, wires, or any otherdesired element shapes that produce negative effective permittivity andnegative effective permeability for the structure.

The distance a between the cut outs and the size b of the cutouts can beselected to reduce or avoid coupling excitation patterns projected ontoopposite surfaces of a wall. The density of air or other gas in thesystem can be selected to minimize the difference in index of refractionbetween components thereby reducing reflections and losses in thesystem. Activation of the photoconductive materials can be accomplishedusing any suitable photon source, including, but not limited to lasers.Individual elements or groups of elements can be selectively illuminatedby the use of projection masks, microelectromechanical devices such asmirrored cantilevered microelectromechanical devices, or other suitabledevices or optical elements.

The invention has been described with reference to certain preferredembodiments. It will be understood, however, that the invention is notlimited to the preferred embodiments discussed above, and thatmodification and variations are possible within the scope of theappended claims.

1. A structure operable to have an above band-gap excitation frequencyand a below band-gap operational frequency range in which the effectiveindex of refraction of the structure is tunable from positive tonegative, the structure comprising: a substrate; at least one resonantelement disposed on the substrate arranged to induce a negativepermeability in the operational frequency range; and at least one stripline element disposed on the substrate arranged to induce a negativepermittivity in the operational frequency range, wherein at least one ofthe substrate, the strip line element, and the resonant elementcomprises a photoconductive semiconductor material.
 2. The structureaccording to claim 1, wherein both the strip line element and theresonant element comprise a photoconductive semiconductor material. 3.The structure according to claim 1, wherein the strip line elementcomprises metal and the resonant element comprises a photoconductivesemiconductor material.
 4. The structure according to claim 1, whereinthe strip line element comprises a photoconductive semiconductormaterial and the resonant element comprises metal.
 5. The structureaccording to claim 1, wherein the resonant element is a split ringresonator.
 6. The structure according to claim 1, wherein the resonantelement comprises a split ring resonator with at least one split metalring and a gap between ends of the split metal ring, and aphotoconductive semiconductor material joins the ends of the split metalring.
 7. The structure according to claim 1, wherein the strip lineelement comprises a plurality of metal segments joined withphotoconductive semiconductor material.
 8. The structure according toclaim 1, wherein the operational frequency is in a microwave range. 9.The structure according to claim 1, wherein the excitation frequency isa visible or near infrared frequency.
 10. The structure according toclaim 1, wherein the resonant element and the strip line element aredisposed on opposite faces of a substrate.
 11. The structure accordingto claim 1, wherein the elements comprise at least one of silicon,gallium arsenide, germanium, and gallium nitride.
 12. The structureaccording to claim 1, wherein the substrate comprises sapphire.
 13. Thestructure according to claim 1, wherein the resonant elements and thestrip line elements are metallic, and the substrate comprises atransparent dielectric material and at least one layer of aphotoconductive semiconductor material.
 14. A structure operable to havean above band-gap excitation frequency and a below band-gap operationalfrequency range in which the effective index of refraction of thestructure is tunable from positive to negative, the structurecomprising: a substrate, said substrate being transparent at theexcitation frequency and in the operational frequency range; at leastone resonant element disposed on the substrate arranged to induce anegative permeability in the operational frequency range; and at leastone strip line element disposed on the substrate arranged to induce anegative permittivity in the operational frequency range, wherein atleast one of the substrate, the strip line element, and the resonantelement comprises a photoconductive semiconductor material.
 15. A methodfor tuning a metamaterial structure between a positive effective indexof refraction value and a negative effective index of refraction, thestructure operable to have an above band-gap excitation frequency and abelow band-gap operational frequency range in which the effective indexof refraction of the structure is tunable from positive to negative, thestructure having a substrate, at least one resonant element disposed onthe substrate arranged to induce a negative permeability in the belowband-gap operational frequency range, and at least one strip lineelement disposed on the substrate arranged to induce a negativepermittivity in the operational frequency range, wherein at least one ofthe substrate, the strip line element, and the resonant elementcomprises a photoconductive semiconductor material, the methodcomprising: the photoconductive semiconductor material receiving aboveband-gap photons at the excitation frequency.
 16. A method for tuning ametamaterial structure between a positive effective index of refractionvalue and a negative effective index of refraction, the structureoperable to have an above band-gap excitation frequency and a belowband-gap operational frequency range in which the effective index ofrefraction of the structure is tunable from positive to negative, thestructure having a substrate, a plurality of resonant elements disposedon the substrate arranged to induce a negative permeability in the belowband-gap operational frequency range, and a plurality of strip lineelements disposed on the substrate arranged to induce a negativepermittivity in the operational frequency range, wherein at least one ofthe substrate, the strip line element, and the resonant elementcomprises a photoconductive semiconductor material, the methodcomprising: the photoconductive semiconductor material receiving a timevarying distribution of above band-gap photons at the excitation frequency.
 17. The method according to claim 16, wherein varying thedistribution induces conductivity in changing numbers of strip lineelements or resonant elements, changing the effective index ofrefraction for the structure.
 18. The method according to claim 16,wherein the distribution of above band-gap photons induces conductivityin at least three adjacent resonant elements or strip line elements. 19.The method according to claim 16, wherein the distribution of aboveband-gap photons induces conductivity in at least a three by three groupof adjacent strip line elements or resonant elements.
 20. A method forsweeping a beam of radiation over an angle with a structure, thestructure operable to have an above band-gap excitation frequency and abelow band-gap operational frequency range in which the effective indexof refraction of the structure is tunable from positive to negative, thestructure having a substrate, a plurality of split ring resonatorsarranged to induce a negative permeability in the operational frequencyrange and a plurality of strip line elements arranged on the substrateto induce a negative permittivity in the operational frequency range, atleast one of the substrate, the plurality of split ring resonators andthe plurality of strip line elements comprising a photoconductivesemiconductor, the method comprising: the photoconductive semiconductorreceiving a time varying distribution of above band-gap photons at theexcitation frequency; and the structure receiving below band-gapradiation in the operational frequency range, said time varyingdistribution of above band-gap photons changing the index of refractionof the structure to change the angle of the below band-gap radiation asthe below band-gap radiation passes through an exit interface of thestructure.